Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 50,
  • Issue 1,
  • pp. 119-125
  • (1996)

Polymer Film Thickness Determination with a High-Precision Scanning Reflectometer

Not Accessible

Your library or personal account may give you access

Abstract

A fiber-optic-based optical low coherence reflectometer (OLCR) is used to measure the thickness of polyester films. The measurements are made on both stationary and moving films to show the feasibility of this technique in a process environment. Autocorrelation is used to extract useful data from raw reflectometry data, and a statistical analysis of the data from both moving and stationary films is done to help demonstrate the application of this method. Although the reflectometer is not optimally configured for process analysis, a reliable estimate of polymer film thickness is shown in less than one minute measurement time for the moving films.

PDF Article
More Like This
A Normal Incidence Scanning Reflectometer of High Precision

Ulrich Gerhardt and Gary W. Rubloff
Appl. Opt. 8(2) 305-308 (1969)

High-precision reflectometer for submillimeter wavelengths

A. J. Gatesman, R. H. Giles, and J. Waldman
J. Opt. Soc. Am. B 12(2) 212-219 (1995)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved